A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers

Frederik Goethals, Mikhail R. Baklanov, Ivan Ciofi, Christophe Detavernier, Pascal Van Der Voort, Isabel Van Driessche
  • Chemical Communications, January 2012, Royal Society of Chemistry
  • DOI: 10.1039/c2cc18017k
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The following have contributed to this page: Pascal Van Der Voort