Chemical vapour deposition of In2O3 thin films from a tris-guanidinate indium precursor

Seán T. Barry, Peter G. Gordon, Matthew J. Ward, Mikko J. Heikkila, Wesley H. Monillas, Glenn P. A. Yap, Mikko Ritala, Markku Leskelä
  • Dalton Transactions, January 2011, Royal Society of Chemistry
  • DOI: 10.1039/c1dt10877h
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