Preparation of wafer-level glass cavities by a low-cost chemical foaming process (CFP)

Jintang Shang, Boyin Chen, Wei Lin, Ching-Ping Wong, Di Zhang, Chao Xu, Junwen Liu, Qing-An Huang
  • Lab on a Chip, January 2011, Royal Society of Chemistry
  • DOI: 10.1039/c0lc00708k