A rapid and economical method for profiling feature heights during microfabrication

Gloria S. Yen, Bryant S. Fujimoto, Thomas Schneider, Desmond T.K. Huynh, Gavin D.M. Jeffries, Daniel T. Chiu
  • Lab on a Chip, January 2011, Royal Society of Chemistry
  • DOI: 10.1039/c0lc00470g