High-frequency nanofluidics: a universal formulation of the fluid dynamics of MEMS and NEMS

K. L. Ekinci, V. Yakhot, S. Rajauria, C. Colosqui, D. M. Karabacak
  • Lab on a Chip, January 2010, Royal Society of Chemistry
  • DOI: 10.1039/c003770m