Diffusion of water into SU-8 microcantilevers

Chuanjun Liu, Ying Liu, Mordechai Sokuler, Daniela Fell, Stephan Keller, Anja Boisen, Hans-Jürgen Butt, Günter K. Auernhammer, Elmar Bonaccurso
  • Physical Chemistry Chemical Physics, January 2010, Royal Society of Chemistry
  • DOI: 10.1039/c002478c