Spin-coated and PECVD low dielectric constant porous organosilicate films studied by 1D and 2D solid-state NMR

Olivier Gourhant, Vincent Jousseaume, Guillaume Gerbaud, Sabine Hediger, Michel Bardet, Laurent Favennec, Aziz Zenasni, Julien Beynet
  • Physical Chemistry Chemical Physics, January 2009, Royal Society of Chemistry
  • DOI: 10.1039/b909654j
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