Laminar flow used as “liquid etch mask” in wet chemical etching to generate glass microstructures with an improved aspect ratio

Xuan Mu, Qionglin Liang, Ping Hu, Kangning Ren, Yiming Wang, Guoan Luo
  • Lab on a Chip, January 2009, Royal Society of Chemistry
  • DOI: 10.1039/b904769g