Deposition of osmium thin films using pyrazolate complexes as CVD source reagents

  • Yun Chi, Huan-Li Yu, Wei-Li Ching, Chao-Shiuan Liu, Yao-Lun Chen, Tsung-Yi Chou, Shie-Ming Peng, Gene-Hsiang Lee
  • Journal of Materials Chemistry, March 2002, Royal Society of Chemistry
  • DOI: 10.1039/b109150f

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