Determination of ultratrace metallic impurities in polysilane and siloxane polymers for microelectronic devices

  • Miyuki Takenaka, Yuji Yamada, Shoji Kozuka
  • Journal of Analytical Atomic Spectrometry, January 2001, Royal Society of Chemistry
  • DOI: 10.1039/b008700i

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http://dx.doi.org/10.1039/b008700i

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