Kinetic surface roughening and wafer bow control in heteroepitaxial growth of 3C-SiC on Si(111) substrates

  • Li Wang, Glenn Walker, Jessica Chai, Alan Iacopi, Alanna Fernandes, Sima Dimitrijev
  • Scientific Reports, October 2015, Nature Publishing Group
  • DOI: 10.1038/srep15423

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http://dx.doi.org/10.1038/srep15423

The following have contributed to this page: Jessica Chai