Atomic Layer Deposition of Tantalum Nitride Using A Novel Precursor

Shikha Somani, Atashi Mukhopadhyay, Charles Musgrave
  • The Journal of Physical Chemistry C, June 2011, American Chemical Society (ACS)
  • DOI: 10.1021/jp1059374

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http://dx.doi.org/10.1021/jp1059374

The following have contributed to this page: Charles Musgrave