A Quantum Chemical Study of the Atomic Layer Deposition of Al 2 O 3 Using AlCl 3 and H 2 O as Precursors

Annica Heyman, Charles B. Musgrave
  • The Journal of Physical Chemistry, May 2004, American Chemical Society (ACS)
  • DOI: 10.1021/jp049762x

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http://dx.doi.org/10.1021/jp049762x

The following have contributed to this page: Charles Musgrave