DFT Study of the Adsorption of Chlorosilanes on the Si(100)-2 × 1 Surface

Charles B. Musgrave, Michael A. Hall, Collin Mui
  • The Journal of Physical Chemistry, December 2001, American Chemical Society (ACS)
  • DOI: 10.1021/jp0118874

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http://dx.doi.org/10.1021/jp0118874

The following have contributed to this page: Charles Musgrave