A DFT Study of the Al 2 O 3 Atomic Layer Deposition on SAMs:  Effect of SAM Termination

Ye Xu, Charles B. Musgrave
  • Chemistry of Materials, February 2004, American Chemical Society (ACS)
  • DOI: 10.1021/cm035009p

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http://dx.doi.org/10.1021/cm035009p

The following have contributed to this page: Charles Musgrave