Growth and Characterization of Al 2 O 3 Atomic Layer Deposition Films on sp 2 -Graphitic Carbon Substrates Using NO 2 /Trimethylaluminum Pretreatment

Matthias J. Young, Charles B. Musgrave, Steven M. George
  • ACS Applied Materials & Interfaces, June 2015, American Chemical Society (ACS)
  • DOI: 10.1021/acsami.5b02167

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1021/acsami.5b02167

The following have contributed to this page: Charles Musgrave