Atomic Layer Deposition of Hafnium Oxide from Hafnium Chloride and Water

Atashi B. Mukhopadhyay, Charles B. Musgrave, Javier Fdez. Sanz
  • Journal of the American Chemical Society, September 2008, American Chemical Society (ACS)
  • DOI: 10.1021/ja801616u
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The following have contributed to this page: Charles Musgrave