What is it about?
Scanning microwave microscopy
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Why is it important?
The only way to achieve nanometer resolution microwave imaging
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This page is a summary of: Scanning microwave microscopy of buried CMOS interconnect lines with nanometer resolution, International Journal of Microwave and Wireless Technologies, April 2018, Cambridge University Press,
DOI: 10.1017/s1759078718000181.
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