What is it about?
Using a scanning electron microscope, thin film specimens may be examined and analysed without the scatter problems that occur in the transmission electron microscope, where the specimen is surrounded by material that may contribute artefacts to the analysis. Specimens are mounted over a Faraday Cup to prevent any interference from the specimen older, whilst the use of a thin film reduces the interaction volume enabling high resolution analysis to be accomplished.
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Why is it important?
This technique offers high resolution analysis to any laboratory that has a scanning electron microscope and x-ray analytical equipment. Conventional thin film analysis has always required a transmission electron microscope
Perspectives
Scanning electron microscopes are often undervalued in this area of investigation, this paper is designed to encourage scientist to think “outside the box” when looking at x-ray analysis procedures.
Stephen Chapman
Read the Original
This page is a summary of: High Spatial Resolution X-Ray Analysis in a SEM, Microscopy Today, March 2014, Oxford University Press (OUP),
DOI: 10.1017/s1551929513001120.
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