What is it about?
Use of achromatic quadrupoles as the objective lens in the helium microscope, producing improved resolution at the smallest focii.
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Why is it important?
Because of the straight-line trajectories of ions, ion microscopy, including helium microscopy, has promise for the in-situ analysis of microcircuits, where circuits are becoming so small that scanning electron microscopes fail, and pieces must be cut out, thinned, and carried to transmission electron microscopes in order to be analysed .
Perspectives
This article has the ray diagram for a two lens (condensing and objective lenses) column, where Cs correction is included in the objective lens, rather than in a more complicated mid-column corrector assembly.
Dr Fred W. Martin
Nanobeam Corporation
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This page is a summary of: A Proposal for Improved Helium Microscopy, Microscopy and Microanalysis, April 2014, Oxford University Press (OUP),
DOI: 10.1017/s1431927614000555.
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