What is it about?
This paper highlights how through the use of an electron energy spectrometer inside the SEM, it can track how buried charge can accumulate and dissipate in metal-insulator samples. It also shows how stable charging conditions can be created within the SEM with these kinds of specimens
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Why is it important?
It demonstrates the value of using an energy electron spectrometer inside the Scanning Electron Microscope and how it has many important applications for material science
Perspectives
Capturing the secondary electron energy spectrum inside a Scanning Electron Microscope and extracting useful material science information from it on the nano-scale has many important applications for the future
Anjam Khursheed
National University of Singapore
Read the Original
This page is a summary of: Secondary Electron Energy Contrast of Localized Buried Charge in Metal–Insulator–Silicon Structures, Microscopy and Microanalysis, October 2018, Cambridge University Press,
DOI: 10.1017/s1431927618015052.
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