Practical approach to extraction of piezoresistance coefficient

What is it about?

For finding the longitudinal and transverse components of the piezoresistance coefficient (π_L and π_T, respectively), a practically useful approach will be considered. Measurements of the piezoresistors on a pressure-sensor membrane and stress modelling using the finite-element method are employed for this purpose. The presented method has been used for the extraction of piezoresistance coefficient versus temperature.

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