Optimization of semiconductor dew point hygrometer mirrors surface temperature homogeneity

What is it about?

The temperature homogeneity on the dew point hygrometer mirror is one of the most important factor effected on measurement accuracy. The semiconductor mirror structure facilitated with thermoresistor, two heaters and with additional dew/frost detector has been computer simulated for recognition of temperature distribution on its surface. Two detector structures, the first one located on silicon membrane and the second placed on bulk materials have been compared in the paper. The analysis of optimal heating power applied to heaters to achieve homogenous detector surface temperature distribution has been presented in the report. Finally, the simulation results have been compared with measurement results.

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