Analytical characterization of a planar magnetron radio frequency glow-discharge source

  • M.J. Heintz, J.A.C. Broekaert, G.M. Hieftje
  • Spectrochimica Acta Part B Atomic Spectroscopy, May 1997, Elsevier
  • DOI: 10.1016/s0584-8547(96)01650-3

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http://dx.doi.org/10.1016/s0584-8547(96)01650-3

The following have contributed to this page: Professor Gary M Hieftje