Redistribution of Er implanted into Si(100): Correlation with implantation induced damage

T.K Chini, D.P Datta, B Satpati, M Tanemura, F Okuyama
  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, December 2003, Elsevier
  • DOI: 10.1016/s0168-583x(03)01499-x

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http://dx.doi.org/10.1016/s0168-583x(03)01499-x

The following have contributed to this page: Biswarup Satpati