Surface acoustic wave resonators based on (002)AlN/Pt/diamond/silicon layered structure

Changjian Zhou, Yi Yang, Hao Jin, Bin Feng, Shurong Dong, Jikui Luo, Tian-Ling Ren, Mansun Chan, Cary Y. Yang
  • Thin Solid Films, December 2013, Elsevier
  • DOI: 10.1016/j.tsf.2013.09.050

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http://dx.doi.org/10.1016/j.tsf.2013.09.050

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