Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering

H. Jin, J. Zhou, S.R. Dong, B. Feng, J.K. Luo, D.M. Wang, W.I. Milne, C.Y. Yang
  • Thin Solid Films, May 2012, Elsevier
  • DOI: 10.1016/j.tsf.2012.03.015

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