Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering

H. Jin, J. Zhou, S.R. Dong, B. Feng, J.K. Luo, D.M. Wang, W.I. Milne, C.Y. Yang
  • Thin Solid Films, May 2012, Elsevier
  • DOI: 10.1016/j.tsf.2012.03.015

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1016/j.tsf.2012.03.015

The following have contributed to this page: Jack Luo (Jikui Luo)