A quantum chemical study of ZrO2 atomic layer deposition growth reactions on the SiO2 surface

Joseph H. Han, Guilian Gao, Yuniarto Widjaja, Eric Garfunkel, Charles B. Musgrave
  • Surface Science, February 2004, Elsevier
  • DOI: 10.1016/j.susc.2003.12.030

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The following have contributed to this page: Charles Musgrave