Structure-property correlations in aluminum oxide thin films grown by reactive AC magnetron sputtering

  • Deepak G. Bhat, Adrian Harris, Ben D. Beake, Atul Khanna
  • Surface and Coatings Technology, October 2006, Elsevier
  • DOI: 10.1016/j.surfcoat.2006.01.033

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http://dx.doi.org/10.1016/j.surfcoat.2006.01.033

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