Deposition and characterization of sputtered ZnO films

W.L. Dang, Y.Q. Fu, J.K. Luo, A.J. Flewitt, W.I. Milne
  • Superlattices and Microstructures, July 2007, Elsevier
  • DOI: 10.1016/j.spmi.2007.04.081

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