AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

L. García-Gancedo, Z. Zhu, E. Iborra, M. Clement, J. Olivares, A.J. Flewitt, W.I. Milne, G.M. Ashley, J.K. Luo, X.B. Zhao, J.R. Lu
  • Sensors and Actuators B Chemical, December 2011, Elsevier
  • DOI: 10.1016/j.snb.2011.09.083

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