Controlling stress and stress gradient during the release process in gold suspended micro-structures

V. Mulloni, F. Giacomozzi, B. Margesin
  • Sensors and Actuators A Physical, July 2010, Elsevier
  • DOI: 10.1016/j.sna.2010.06.013

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1016/j.sna.2010.06.013

The following have contributed to this page: Viviana Mulloni