MEMS based digital variable capacitors with a high-k dielectric insulator

J.K. Luo, M. Lin, Y.Q. Fu, L. Wang, A.J. Flewitt, S.M. Spearing, N.A. Fleck, W.I. Milne
  • Sensors and Actuators A Physical, November 2006, Elsevier
  • DOI: 10.1016/j.sna.2006.04.025

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The following have contributed to this page: Jack Luo (Jikui Luo)