MeV heavy ion beam induced epitaxial crystallization of buried Si3N4 layer

T. Som, B. Satpati, O.P. Sinha, N.C. Mishra, D. Kanjilal
  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, March 2006, Elsevier
  • DOI: 10.1016/j.nimb.2005.11.037

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http://dx.doi.org/10.1016/j.nimb.2005.11.037

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