Rutherford backscattering and electron microscopy study of annealing behavior of MeV implanted gold in silicon

S. Mohapatra, D.P. Mahapatra
  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, July 2004, Elsevier
  • DOI: 10.1016/j.nimb.2004.01.215

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The following have contributed to this page: Dr. Satyabrata Mohapatra