High efficiency gettering of Au in Si(111) by MeV C implantation

S. Mohapatra, B. Joseph, D.P. Mahapatra, P. Chakraborty
  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, June 2004, Elsevier
  • DOI: 10.1016/j.nimb.2003.12.005

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The following have contributed to this page: Dr. Satyabrata Mohapatra