Fabrication of interconnected multilevel channels in a monolithic SU-8 structure using a LOR sacrificial layer

Maria Serena Chiriacò, Monica Bianco, Francesco Amato, Elisabetta Primiceri, Francesco Ferrara, Valentina Arima, Giuseppe Maruccio
  • Microelectronic Engineering, October 2016, Elsevier
  • DOI: 10.1016/j.mee.2016.07.006

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http://dx.doi.org/10.1016/j.mee.2016.07.006

The following have contributed to this page: Giuseppe Maruccio