Flexible piezoelectric cantilevers fabricated on polyimide substrate

S. Petroni, G. Maruccio, F. Guido, M. Amato, A. Campa, A. Passaseo, M.T. Todaro, M. De Vittorio
  • Microelectronic Engineering, October 2012, Elsevier
  • DOI: 10.1016/j.mee.2012.05.055

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http://dx.doi.org/10.1016/j.mee.2012.05.055

The following have contributed to this page: Giuseppe Maruccio