AlN on polysilicon piezoelectric cantilevers for sensors/actuators

C. Giordano, I. Ingrosso, M.T. Todaro, G. Maruccio, S. De Guido, R. Cingolani, A. Passaseo, M. De Vittorio
  • Microelectronic Engineering, April 2009, Elsevier
  • DOI: 10.1016/j.mee.2008.12.075

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

The following have contributed to this page: Giuseppe Maruccio