AlN on polysilicon piezoelectric cantilevers for sensors/actuators

C. Giordano, I. Ingrosso, M.T. Todaro, G. Maruccio, S. De Guido, R. Cingolani, A. Passaseo, M. De Vittorio
  • Microelectronic Engineering, April 2009, Elsevier
  • DOI: 10.1016/j.mee.2008.12.075

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http://dx.doi.org/10.1016/j.mee.2008.12.075

The following have contributed to this page: Giuseppe Maruccio