Electromechanical characterization of low actuation voltage RF MEMS capacitive switches based on DC CV measurements

C. Calaza, B. Margesin, F. Giacomozzi, K. Rangra, V. Mulloni
  • Microelectronic Engineering, May 2007, Elsevier
  • DOI: 10.1016/j.mee.2007.01.196

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http://dx.doi.org/10.1016/j.mee.2007.01.196

The following have contributed to this page: Viviana Mulloni