Fabrication of RF-MEMS switches on LTCC substrates using PECVD a-Si as sacrificial layer

E. Cianci, A. Coppa, V. Foglietti, M. Dispenza, R. Buttiglione, A.M. Fiorello, R. Marcelli, S. Catoni, D. Pochesci
  • Microelectronic Engineering, May 2007, Elsevier
  • DOI: 10.1016/j.mee.2007.01.096

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http://dx.doi.org/10.1016/j.mee.2007.01.096

The following have contributed to this page: Dr Romolo Marcelli