Fabrication of actuator for nanopositioning using laser micro-machining

V. Lendraitis, M. Brikas, V. Snitka, V. Mizarienė, G. Raciukaitis
  • Microelectronic Engineering, April 2006, Elsevier
  • DOI: 10.1016/j.mee.2006.01.203

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The following have contributed to this page: Dr Gediminas Raciukaitis