Performance of gas jet type Z-pinch plasma light source for EUV lithography

Inho Song, Yasunori Kobayashi, Toshiro Sakamoto, Smruti R. Mohanty, Masato Watanabe, Akitoshi Okino, Toru Kawamura, Koichi Yasuoka, Kazuhiko Horioka, Eiki Hotta
  • Microelectronic Engineering, April 2006, Elsevier
  • DOI: 10.1016/j.mee.2006.01.001

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http://dx.doi.org/10.1016/j.mee.2006.01.001

The following have contributed to this page: Professor Akitoshi Okino