Ultra-violet light assisted reactive RF magnetron sputtering deposition of AlN thin films at room temperature

Bin Feng, Shurong Dong, Hao Jin, Jian Zhou, Yi Yang, Tianling Ren, Jikui Luo, Demiao Wang
  • Materials Letters, July 2012, Elsevier
  • DOI: 10.1016/j.matlet.2012.03.083

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http://dx.doi.org/10.1016/j.matlet.2012.03.083

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