Application of laser induced electron impact ionization to the deposition chemistry in the hot-wire chemical vapor deposition process with SiH4-NH3 gas mixtures

Brett Eustergerling, Martin Hèden, Yujun Shi
  • Journal of the American Society for Mass Spectrometry, November 2007, American Chemical Society (ACS)
  • DOI: 10.1016/j.jasms.2007.08.012

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The following have contributed to this page: Yujun Shi