A systematic study on metal-assisted chemical etching of high aspect ratio silicon nanostructures

  • Ali Ghafarinazari, Masoud Mozafari
  • Journal of Alloys and Compounds, December 2014, Elsevier
  • DOI: 10.1016/j.jallcom.2014.07.044

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication


The following have contributed to this page: Masoud Mozafari