What is it about?
Aberrations (deviations from perfect focus) caused by variations in particle speed (chromatic aberration), distance from the lens axis (aperture aberration) and imperfect location of lens poles (parasitic aberration).
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Why is it important?
For the first time it lays out a method to overcome aberrations caused by mechanical imperfections in quadrupole lenses. Such lenses have promise for ion microscopy, a subject of paramount importance to the semiconductor fabrication industry.
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This is an archival publication summarizing many years of work at Nanobeam and Microscope Associates.
Dr Fred W. Martin
Nanobeam Corporation
Read the Original
This page is a summary of: Cc, Cs, and parasitic correction in quadrupole probe-forming lenses, Optik, February 2014, Elsevier,
DOI: 10.1016/j.ijleo.2013.08.013.
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