Non-growth ligand exchange reactions in atomic layer deposition of HfO2

A.B. Mukhopadhyay, Charles B. Musgrave
  • Chemical Physics Letters, April 2006, Elsevier
  • DOI: 10.1016/j.cplett.2006.01.057

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http://dx.doi.org/10.1016/j.cplett.2006.01.057

The following have contributed to this page: Charles Musgrave