Microstructuring of fused silica by laser-induced backside wet etching using picosecond laser pulses

M. Ehrhardt, G. Raciukaitis, P. Gecys, K. Zimmer
  • Applied Surface Science, September 2010, Elsevier
  • DOI: 10.1016/j.apsusc.2010.05.055

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http://dx.doi.org/10.1016/j.apsusc.2010.05.055

The following have contributed to this page: Dr Gediminas Raciukaitis