Microstructure, porosity and roughness of RF sputtered oxide thin films: Characterization and modelization

Fahd Oudrhiri-Hassani, Lionel Presmanes, Antoine Barnabé, Philippe Tailhades
  • Applied Surface Science, July 2008, Elsevier
  • DOI: 10.1016/j.apsusc.2008.03.149

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http://dx.doi.org/10.1016/j.apsusc.2008.03.149

The following have contributed to this page: Philippe Tailhades